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    GaN Product

    10 X 10.5mm² GaN Substrates (Fe-doped)

    10 X 10.5mm² Free-Standing

    Gallium Nitride Substrates (Fe-doped)


    D-GaNCSI-C50
    Resistivity :> 10⁶ Ω·cm

    Dislocation Density:

    1~3 x 10⁶ cmˉ²

    5~9 x 10⁵ cmˉ²

    1~5 x 10⁵ cmˉ²
    Polishing :Ga-face Polishing

    N-face Polishing

    Double side Polishing


    Detail

    Specification


    ItemD-GaNCSI-S10
    Size10 X 10.5 mm²
    Thickness350 ± 25 μm
    Dislocation DensityFrom 1 x 10⁵ to 3 x 10⁶ cmˉ²
    OrientationC-Plane (0001) off angle toward M-Axis  0.35 ± 0.15º 
    TTV≤ 10 μm
    BOW≤ 10 μm
    Conduction TypeN-type
    Resistivity (300K)> 10⁶ Ω·cm
    Useable area> 90%
    PolishingFront Surface:Ra<0.2 nm(polished);  or <0.3nm(polished and surface treatment for epitaxy)
    Back Surface:0.5~1.5μm;   option:1-3nm(Fine ground); <0.2nm(polished)
    PackagePackaged in a class 100 clean room environment, in single container,under a nitrogen atmosphere.

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